Bragg reflector based on periodic structures for silicon MOEMS applications

Munizer G. Purica; Elena Budianu; Mihai Kusko; Daniela Dragoman; George Dinescu

doi:10.1117/12.545585

16 August 2004 Bragg reflector based on periodic structures for silicon MOEMS applications

Munizer G. Purica, Elena Budianu, Mihai Kusko, Daniela Dragoman, George Dinescu

Proceedings Volume 5455, MEMS, MOEMS, and Micromachining; (2004) https://doi.org/10.1117/12.545585
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

We report an analytical model for calculation of reflection and transmission coefficients of a Bragg reflector with periodic structure using transfer matrix method. Using explicit expressions for these coefficients, the reflectivity of the periodic structures for different pairs of layers and layer thickness was simulated. We investigate the reflectivity of the periodic structures consisting of following pairs of successive layers: SiO₂ /Si₃N₄ (low ratio of refractive indexes); poly-Si/ SiO₂ (high ratio), Si/air-gap (high contrast). The theoretical and experimental investigations of a particular periodic structure consisting of SiO₂/Au are also presented. Our method allows the rapid evaluation of reflectance of Bragg reflector with periodic structure.

Citation Download Citation

Munizer G. Purica, Elena Budianu, Mihai Kusko, Daniela Dragoman, and George Dinescu "Bragg reflector based on periodic structures for silicon MOEMS applications", Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); https://doi.org/10.1117/12.545585

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