GaAs arrays for X-ray spectroscopy

Alan Owens; Hans Andersson; M. Campbell; David H. Lumb; Seppo Arvo Anter Nenonen; Lukas Tlustos

doi:10.1117/12.552930

29 September 2004 GaAs arrays for x-ray spectroscopy

Alan Owens, Hans Andersson, M. Campbell, David H. Lumb, Seppo Arvo Anter Nenonen, Lukas Tlustos

Proceedings Volume 5501, High-Energy Detectors in Astronomy; (2004) https://doi.org/10.1117/12.552930
Event: SPIE Astronomical Telescopes + Instrumentation, 2004, Glasgow, United Kingdom

Abstract

We present results from our compound semiconductor laboratory program and describe the development of a large area GaAs imaging array for planetary remote sensing applications. The device is fabricated from ~150 micron thick epitaxial material, patterned into a 64 x 64 pixel array, back-thinned and contacted. It will be flip-chip bump bonded onto a custom designed, fully spectroscopic, low noise (< 20 e- rms) active pixel sensor ASIC. At present, the ASIC is still under development and so in order to validate and qualify the various technological steps, we have produced a GaAs imager based on the MEDIPIX-1 format using a MEDIPIX-1 readout chip. In X-ray tests, the device was found to work well with a bump yield of 99.9%. After flat field corrections, the spatial uniformity of the array was commensurate with Poisson noise.

Citation Download Citation

Alan Owens, Hans Andersson, M. Campbell, David H. Lumb, Seppo Arvo Anter Nenonen, and Lukas Tlustos "GaAs arrays for x-ray spectroscopy", Proc. SPIE 5501, High-Energy Detectors in Astronomy, (29 September 2004); https://doi.org/10.1117/12.552930

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