Near-diffraction limited coherent x-ray focusing using planar refractive lenses made of epoxy SU-8 resist

Irina I. Snigireva; Anatoly A. Snigirev; Michael Drakopoulos; Victor G. Kohn; Vladimir P. Nazmov; Elena F. Reznikova; Jurgen Mohr; Volker Saile

doi:10.1117/12.561082

4 November 2004 Near-diffraction limited coherent x-ray focusing using planar refractive lenses made of epoxy SU-8 resist

Irina I. Snigireva, Anatoly A. Snigirev, Michael Drakopoulos, Victor G. Kohn, Vladimir P. Nazmov, Elena F. Reznikova, Jurgen Mohr, Volker Saile

Author Affiliations +

Proceedings Volume 5539, Design and Microfabrication of Novel X-Ray Optics II; (2004) https://doi.org/10.1117/12.561082
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

We present results on comprehensive studies of high resolution SU-8 planar refractive lenses. Lens optical properties were investigated using coherent high energy X-ray radiation. Resolution of about 270 nm was measured for the lens consisting of 31 individual lenses at energy 14 keV. Coherent properties of the set-up permit to resolve near-focus fine structure, which is determined by tiny aberrations caused by lens imperfections close to the parabola apex. This study allows understanding as far SR deep lithography as possible can maintaine to close tolerances for lens parameters. Two-dimensional focusing crossed lenses were tested and imaging experiments in projection and imaging mode were conducted. Radiation stability test was performed and conclusions on the applicability of SU-8 lenses were done.

Citation Download Citation

Irina I. Snigireva, Anatoly A. Snigirev, Michael Drakopoulos, Victor G. Kohn, Vladimir P. Nazmov, Elena F. Reznikova, Jurgen Mohr, and Volker Saile "Near-diffraction limited coherent x-ray focusing using planar refractive lenses made of epoxy SU-8 resist", Proc. SPIE 5539, Design and Microfabrication of Novel X-Ray Optics II, (4 November 2004); https://doi.org/10.1117/12.561082

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