Azimuth calibration method in ellipsometer with imaging spectrograph

Won Chegal; Yong Jai Cho; Hyun Jong Kim; Hyun Mo Cho; Yun Woo Lee; Soo Hyun Kim

doi:10.1117/12.559382

15 October 2004 Azimuth calibration method in ellipsometer with imaging spectrograph

Won Chegal, Yong Jai Cho, Hyun Jong Kim, Hyun Mo Cho, Yun Woo Lee, Soo Hyun Kim

Proceedings Volume 5546, Imaging Spectrometry X; (2004) https://doi.org/10.1117/12.559382
Event: Optical Science and Technology, the SPIE 49th Annual Meeting, 2004, Denver, Colorado, United States

Abstract

The ellipsometry is known as high precision metrology for thin film thickness measurements and its optical properties by measuring ellipsometric parameters, ψ and Δ, defined as amplitude and phase values of the ratio of Fourier reflection coefficients for p- and s-polarized light. With conventional ellipsometers, we can get average values of ellipsometric parameters in the region of interest determined by spot size of measurement beam. However, we can expand the measurement scheme to two dimensional spectral imaging with additional imaging spectrograph compatible to the structure of ellipsometer. That is, we can simultaneously get spatial and spectroscopic ellipsometric parameters using two dimensional imaging detectors. Using this type of ellipsometers, polarization state dependent response of imaging spectrograph must be considered carefully during azimuth calibration procedures as well as ellipsometric parameters measurement. In this paper, we suggest Jones calculus model for ellipsometer with considering dichroic response in spectrograph and background signal levels in detector. And we show experimental calibration results comparison with that of simulation using suggested Jones calculus model.

Citation Download Citation

Won Chegal, Yong Jai Cho, Hyun Jong Kim, Hyun Mo Cho, Yun Woo Lee, and Soo Hyun Kim "Azimuth calibration method in ellipsometer with imaging spectrograph", Proc. SPIE 5546, Imaging Spectrometry X, (15 October 2004); https://doi.org/10.1117/12.559382

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