Paper
6 December 2004 Predicting computer resource usage
Author Affiliations +
Abstract
GDSII file size is not very well correlated with the computer runtime and memory required to perform RET processing. Occasionally, small files can take many hours to process, while large files can run very quickly. The ability to accurately predict resource requirements for RET processing is essential to optimizing RET automation. In this paper, we examine GDSII complexity metrics in an effort to find a method for predicting RET processing resource requirements.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Alfred J. Reich, Chi-Min Yuan, and Robert E. Boone "Predicting computer resource usage", Proc. SPIE 5567, 24th Annual BACUS Symposium on Photomask Technology, (6 December 2004); https://doi.org/10.1117/12.568682
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KEYWORDS
Resolution enhancement technologies

Error analysis

Data modeling

Statistical modeling

Statistical analysis

Databases

Optical proximity correction

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