LiNbO3 thin films grown on MgO (100) substrates by pulsed laser deposition

Nadya E. Stankova; Svetlen H. Tonchev; Eniko Gyorgy; Gabriel Socol; Ion N. Mihailescu

doi:10.1117/12.582898

21 October 2004 LiNbO₃ thin films grown on MgO (100) substrates by pulsed laser deposition

Nadya E. Stankova, Svetlen H. Tonchev, Eniko Gyorgy, Gabriel Socol, Ion N. Mihailescu

Proceedings Volume 5581, ROMOPTO 2003: Seventh Conference on Optics; (2004) https://doi.org/10.1117/12.582898
Event: ROMOPTO 2003: Seventh Conference on Optics, 2003, Constanta, Romania

Abstract

LiNbO₃ thin films were grown on (100) MgO substrates by pulsed KrF* (λ = 248 nm, τ_FWHM~20 ns, ν = 1 Hz) laser ablation of Li-rich ceramic targets in low pressure oxygen atmosphere. The substrates were heated during the thin film deposition process at 550°C. The as-grown thin films were submitted to a heat treatment in oxygen atmosphere. Moreover, after analyses the films were annealed for the second time, for 2 hours in air at atmospheric pressure. We studied the effect of ambient gas pressure and heat treatments on the stoichiometry, structure and optical properties of the deposited films. The composition and crystalline state of the deposited films were investigated by X-ray diffraction (XRD), Rutherford backscattering spectroscopy (RBS) and nuclear reaction analyses (NRA).

Citation Download Citation

Nadya E. Stankova, Svetlen H. Tonchev, Eniko Gyorgy, Gabriel Socol, and Ion N. Mihailescu "LiNbO₃ thin films grown on MgO (100) substrates by pulsed laser deposition", Proc. SPIE 5581, ROMOPTO 2003: Seventh Conference on Optics, (21 October 2004); https://doi.org/10.1117/12.582898

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