One-dimensional surface profile measurement with a fast scanning method by detecting angular deflection of a laser beam

Ryo Shinozaki; Osami Sasaki; Takamasa Suzuki

doi:10.1117/12.577647

20 January 2005 One-dimensional surface profile measurement with a fast scanning method by detecting angular deflection of a laser beam

Ryo Shinozaki, Osami Sasaki, Takamasa Suzuki

Author Affiliations +

Proceedings Volume 5633, Advanced Materials and Devices for Sensing and Imaging II; (2005) https://doi.org/10.1117/12.577647
Event: Photonics Asia, 2004, Beijing, China

Abstract

The rough surface of a aluminum cylindrical drum cut by turning tool is measured with a fast scanning method by detecting angular deflection of a laser beam. Reflection pattern from the surface extended into a large region, and contained two kinds of components of narrow and wide patterns. To detect rough surface's slope, the barycentric position of the wide pattern was measured with a PSD, and a beam diameter of 5mm on the surface was adopted. After a proportionality coefficient to convert from PSD output to the surface's slope was determined, an one-dimensional surface profile measurement of the rough surface was performed without a vibration isolator. Measurement error was estimated to be 0.27μm.

Citation Download Citation

Ryo Shinozaki, Osami Sasaki, and Takamasa Suzuki "One-dimensional surface profile measurement with a fast scanning method by detecting angular deflection of a laser beam", Proc. SPIE 5633, Advanced Materials and Devices for Sensing and Imaging II, (20 January 2005); https://doi.org/10.1117/12.577647

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