Study on CCD photoelectric thickness measurement instrument and system

Zong Meng; Fengjie Fan

doi:10.1117/12.575081

17 January 2005 Study on CCD photoelectric thickness measurement instrument and system

Zong Meng, Fengjie Fan

Proceedings Volume 5644, Optoelectronic Devices and Integration; (2005) https://doi.org/10.1117/12.575081
Event: Photonics Asia, 2004, Beijing, China

Abstract

In this paper, optical trigonometry measurement principle and wok principle of linear CCD are introduced, which are based on to design optical focusing and imagery system with He-Ne laser instrument as illuminant. peripheral circuit of linear CCD is designed in theory and experiment. non-contact thickness measurement instrument is constructed, using CCD as photoelectric transformation element and microprocessor as the controller. The principle of measurement system is inclined trigonometry measurement principle and CCD is photoelectric transformation element. The time order driving circuit of CCD is designed.

Citation Download Citation

Zong Meng and Fengjie Fan "Study on CCD photoelectric thickness measurement instrument and system", Proc. SPIE 5644, Optoelectronic Devices and Integration, (17 January 2005); https://doi.org/10.1117/12.575081

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