Modelling Optical Linewidth Measurement Techniques In Order To Improve Precision And Accuracy.

Chris P. Kirk; Andrew W. Gurnell

doi:10.1117/12.949733

2 January 1986 Modelling Optical Linewidth Measurement Techniques In Order To Improve Precision And Accuracy.

Chris P. Kirk, Andrew W. Gurnell

Proceedings Volume 0565, Micron and Submicron Integrated Circuit Metrology; (1986) https://doi.org/10.1117/12.949733
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

Theoretical models for optical imaging are used to investigate the performance of different linewidth measurement techniques. The harmonic content of the image profiles of semiconductor line objects is examined around the focal plane and it is concluded that focusing techniques which utilise the lower harmonics are unreliable. The analysis is used to determine the spatial frequency range for which image based focus detection is possible and the performance of suitable digital spatial filters is investigated. The sensitivity of thin and thick layer measurements to variations in parameters such as thickness, refractive index and wavelength is investigated and it is concluded that measurement variations between specimens may be reduced by using a broad band illumination source. A method of reducing the spread of measurements by contrast correction is presented. A linewidth measurement technique based on image scanning is discussed and typical repeatability performance figures are presented for a purpose built system.

Citation Download Citation

Chris P. Kirk and Andrew W. Gurnell "Modelling Optical Linewidth Measurement Techniques In Order To Improve Precision And Accuracy.", Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); https://doi.org/10.1117/12.949733

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available