Surface profiler for fixed through-glass measurement

Sen Han; Erik Novak; John Wissinger; Bryan W. Guenther; Trisha Browne; Emilio Yanine; Michael Schurig; J. D. Herron; Christy McCloy; Xueyuan Li; Michael B. Krell; Jim Harris

doi:10.1117/12.597080

22 January 2005 Surface profiler for fixed through-glass measurement

Sen Han, Erik Novak, John Wissinger, Bryan W. Guenther, Trisha Browne, Emilio Yanine, Michael Schurig, J. D. Herron, Christy McCloy, Xueyuan Li, Michael B. Krell, Jim Harris

Author Affiliations +

Proceedings Volume 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV; (2005) https://doi.org/10.1117/12.597080
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

An interferometric surface profiler for high-magnification fixed through glass measurement (patent pending), such as for a packaged MEMS or MOEMS measurement, is described in this paper. Three techniques are introduced into the profiler, including aberration correction and long working distance for the objective, substantially shaped illumination and dispersive compensation. Measurement results illuminate that the data of the through glass objective are very close to those of the standard objective.

Citation Download Citation

Sen Han, Erik Novak, John Wissinger, Bryan W. Guenther, Trisha Browne, Emilio Yanine, Michael Schurig, J. D. Herron, Christy McCloy, Xueyuan Li, Michael B. Krell, and Jim Harris "Surface profiler for fixed through-glass measurement", Proc. SPIE 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV, (22 January 2005); https://doi.org/10.1117/12.597080

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