Latching shock sensors for health monitoring and quality control

Michael R. Whitley; Michael S. Kranz; Roy Kesmodel; Sherrie J. Burgett

doi:10.1117/12.593348

22 January 2005 Latching shock sensors for health monitoring and quality control

Michael R. Whitley, Michael S. Kranz, Roy Kesmodel, Sherrie J. Burgett

Proceedings Volume 5717, MEMS/MOEMS Components and Their Applications II; (2005) https://doi.org/10.1117/12.593348
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

The ability to monitor shock level is important for missile health monitoring to predict the performance after storage and eliminate potentially damaged units. Shock sensing is also of interest for monitoring the handling conditions of fragile shipments and providing a measure of unit-level quality control not currently available. A MEMS bi-polar single axis latching shock sensor has been developed with the goal of monitoring shock events and with the potential to "wake up" other sensing circuitry after a shock event occurs. An important feature of the sensor is that power is only consumed when a shock event occurs, making it suitable for long-term remote monitoring applications. The shock sensor has been designed, fabricated and characterized. High volume, low unit cost production will be enabled through the use of standard MEMS fabrication technologies such as DRIE and SOI wafer processing.

Citation Download Citation

Michael R. Whitley, Michael S. Kranz, Roy Kesmodel, and Sherrie J. Burgett "Latching shock sensors for health monitoring and quality control", Proc. SPIE 5717, MEMS/MOEMS Components and Their Applications II, (22 January 2005); https://doi.org/10.1117/12.593348

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