Performance of kilowatt-class laser modules in scaling up laser produced plasma (LPP) EUV source

Samir Ellwi; Andrew Comley; Nick Hay; Ian Henderson; Michael Brownell

doi:10.1117/12.598721

6 May 2005 Performance of kilowatt-class laser modules in scaling up laser produced plasma (LPP) EUV source

Samir Ellwi, Andrew Comley, Nick Hay, Ian Henderson, Michael Brownell

Proceedings Volume 5751, Emerging Lithographic Technologies IX; (2005) https://doi.org/10.1117/12.598721
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

Powerlase has made significant steps forward in developing reliable and cost-effective, kilowatt-class laser modules with short pulse duration and small footprint, for use as EUV drivers. These characteristics in parallel to EUV target requirements are essential for the generation of 115W of in-band EUV power at the intermediate focus. These laser modules can be coupled to the EUV target by using our flexible spatial and temporal multiplexing approach in order to scale up the laser average power on target. The multiplexing method developed by Powerlase is modular and optimised for maximum EUV collection angle. To further this goal we are currently evaluating target materials such as xenon in various phases and forms and also have a programme in place to investigate suitable tin targets.

Citation Download Citation

Samir Ellwi, Andrew Comley, Nick Hay, Ian Henderson, and Michael Brownell "Performance of kilowatt-class laser modules in scaling up laser produced plasma (LPP) EUV source", Proc. SPIE 5751, Emerging Lithographic Technologies IX, (6 May 2005); https://doi.org/10.1117/12.598721

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