Considerations for the use of defocus models for OPC

John L. Sturtevant; J. A. Torres; J. Word; Y. Granik; P. LaCour

doi:10.1117/12.598059

5 May 2005 Considerations for the use of defocus models for OPC

John L. Sturtevant, J. A. Torres, J. Word, Y. Granik, P. LaCour

Proceedings Volume 5756, Design and Process Integration for Microelectronic Manufacturing III; (2005) https://doi.org/10.1117/12.598059
Event: Microlithography 2005, 2005, San Jose, California, United States

Abstract

It has been published that there is potential benefit to utilizing an OPC model based upon defocus instead of best focus processing, to give more robust patterning. While this is true with respect to gross opens and bridging problems, the available CD budget and the anticipated manufacturing consumption of defocus budgets must be considered. The net result will almost certainly always be that for gate layer processing, defocus model based OPC is not desirable. For other layers there may be favorable yield implications to running in such a manner, but the average CD in manufacturing will deviate from the design target. This paper will explore the interplay between variable focus distributions in manufacturing and the required CD control, pointing to those conditions under which a defocus model is advisable, and where it is not. Furthermore, the optimum magnitude of defocus is a compromise and has implications for final electrical performance.

Citation Download Citation

John L. Sturtevant, J. A. Torres, J. Word, Y. Granik, and P. LaCour "Considerations for the use of defocus models for OPC", Proc. SPIE 5756, Design and Process Integration for Microelectronic Manufacturing III, (5 May 2005); https://doi.org/10.1117/12.598059

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available