TiNi shape memory alloy based micropumps

Y. Q. Fu; J. K. Luo; M. Hu; H. J. Du; A. J. Flewitt; W. I. Milne

doi:10.1117/12.608506

1 July 2005 TiNi shape memory alloy based micropumps

Y. Q. Fu, J. K. Luo, M. Hu, H. J. Du, A. J. Flewitt, W. I. Milne

Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.608506
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

Three types of micropumps based on TiNi shape memory alloy thin films were designed and fabricated. The TiNi films were prepared on silicon substrate by co-sputtering TiNi target and a separate Ti target at room temperature, and then post annealed at 650°C. The first pump design is based on a single TiNi/Si bimorph membrane structure with inlet and outlet. The second design is based on three layer structures bonded together, with one TiNi/Si active membrane structure and two layers of check valves. The third design is based on two TiNi/SU-8 composite structures, with TiNi as an actuation element, and SU-8/Si as a spring-back structure. The three types of micropump structures were fabricated based on the conventional MEMS processes.

Citation Download Citation

Y. Q. Fu, J. K. Luo, M. Hu, H. J. Du, A. J. Flewitt, and W. I. Milne "TiNi shape memory alloy based micropumps", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.608506

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