Paper
29 June 2005 Toward a biophotonic MEMS cell sensor
Michael A. Powers, Stephan T. Koev, Arne Schleunitz, Hyunmin Yi, Vildana Hodzic, William E. Bentley, Gregory F. Payne, Gary W. Rubloff, Reza Ghodssi
Author Affiliations +
Proceedings Volume 5839, Bioengineered and Bioinspired Systems II; (2005) https://doi.org/10.1117/12.608531
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain
Abstract
We present a new platform for the optical analysis of biomolecules based upon the polysaccharide chitosan. The versatile, stable, and compatible nature of chitosan makes it an ideal material for integrating biological materials in microfabricated systems. Chitosan’s pH-responsive solubility allows electrochemical deposition, while its chemical reactivity enables facile coupling of proteins, oligonucleotides, and other biomolecules by covalent bonds. This work demonstrates the spatially selective assembly of a fluorescent molecule on chitosan and its applicability to microscale optical transducers. We define multimode waveguides and fluidic channels on a Pyrex wafer using a single layer of SU-8. Our implementation of sidewall patterning of transparent electrodes (indium tin oxide) on SU-8 structures is demonstrated and can be highly beneficial to fluorescent signal transduction. In this optical configuration, normally incident excitation light illuminates a chitosan surface on the vertical face of a collector waveguide intersected by a microfluidic channel. We demonstrate the collection of the optical signal in the integrated waveguide and analyze the signal by coupling the waveguide to a grating spectrometer.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael A. Powers, Stephan T. Koev, Arne Schleunitz, Hyunmin Yi, Vildana Hodzic, William E. Bentley, Gregory F. Payne, Gary W. Rubloff, and Reza Ghodssi "Toward a biophotonic MEMS cell sensor", Proc. SPIE 5839, Bioengineered and Bioinspired Systems II, (29 June 2005); https://doi.org/10.1117/12.608531
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KEYWORDS
Waveguides

Microfluidics

Electrodes

Channel projecting optics

Biomedical optics

Semiconducting wafers

Transducers

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