International standards for metrology of microlens arrays

Takaaki Miyashita

doi:10.1117/12.612827

26 August 2005 International standards for metrology of microlens arrays

Takaaki Miyashita

Proceedings Volume 5858, Nano- and Micro-Metrology; 585802 (2005) https://doi.org/10.1117/12.612827
Event: Optical Metrology, 2005, Munich, Germany

Abstract

The standardization of a microlens brings the merit for both users and suppliers, but which has issues to be solved in the characterization and evaluation due to the small lens size, caused from difficulty to apply the definition of conventional optical systems. Japan has the leading position of the international standardization activities in ISO for characterization of microlens since the early stage. Additionally, the recent development activities of wavefront aberration testing technologies are described.

Citation Download Citation

Takaaki Miyashita "International standards for metrology of microlens arrays", Proc. SPIE 5858, Nano- and Micro-Metrology, 585802 (26 August 2005); https://doi.org/10.1117/12.612827

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