Precision optical and antireflection multilayer and gradient coatings containing reactively sputtered oxides, nitrides and fluorides

H. Bartzsch; P. Frach; J. Weber; J.-S. Liebig

doi:10.1117/12.624633

4 October 2005 Precision optical and antireflection multilayer and gradient coatings containing reactively sputtered oxides, nitrides and fluorides

H. Bartzsch, P. Frach, J. Weber, J.-S. Liebig

Author Affiliations +

Proceedings Volume 5963, Advances in Optical Thin Films II; 59631B (2005) https://doi.org/10.1117/12.624633
Event: Optical Systems Design 2005, 2005, Jena, Germany

Abstract

Optical coatings have been deposited by pulse magnetron sputtering of the target materials silicon and aluminium using the reactive gases oxygen, nitrogen and fluorine. The measured refractive index and roughness of the SiO₂, Si₃N₄, Ta₂O₅ and Al₂O₃ films indicate the deposition of very dense and smooth films. Absorption of SiO₂ and Al₂O₃ films is low even at a wavelength of 193nm. The sputter deposited AlF₃ layers have low absorption until 150 nm but then show an absorption edge. Examples of multilayer include antireflective coatings for ophthalmic lenses and cut filters consisting of up to 150 λ/4 layers. These films were produced at a single stationary coating station without interruption of film deposition by changing the reactive gas during the plasma process. This process was also used for the deposition of rugate filters with apodisation function by continuous variation of the reactive gas composition during the deposition.

Citation Download Citation

H. Bartzsch, P. Frach, J. Weber, and J.-S. Liebig "Precision optical and antireflection multilayer and gradient coatings containing reactively sputtered oxides, nitrides and fluorides", Proc. SPIE 5963, Advances in Optical Thin Films II, 59631B (4 October 2005); https://doi.org/10.1117/12.624633

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available