Advances in interferometric surface measurement

James C. Wyant

doi:10.1117/12.666802

9 December 2005 Advances in interferometric surface measurement

James C. Wyant

Proceedings Volume 6024, ICO20: Optical Devices and Instruments; 602401 (2005) https://doi.org/10.1117/12.666802
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

The addition of electronics, computers, and software to interferometry has provided tremendous improvements in the measurement of surface shape and roughness. This talk will describe three such improvements; use of computer generated holograms for testing aspheric surfaces, techniques for performing interferometric measurements more accurate than the reference surface, and two single-shot phase-shifting interferometric techniques for reducing the sensitivity of an optical test to vibration and measuring dynamically changing surface shapes.

Citation Download Citation

James C. Wyant "Advances in interferometric surface measurement", Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 602401 (9 December 2005); https://doi.org/10.1117/12.666802

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