The application of auto-controlled liquid crystal light valve arrays to photolithography shutter

Yun Chen; Lihui Liang; Huiyang He

doi:10.1117/12.666943

9 December 2005 The application of auto-controlled liquid crystal light valve arrays to photolithography shutter

Yun Chen, Lihui Liang, Huiyang He

Proceedings Volume 6024, ICO20: Optical Devices and Instruments; 60241Z (2005) https://doi.org/10.1117/12.666943
Event: ICO20:Optical Devices and Instruments, 2005, Changchun, China

Abstract

Photolithography shutter is usually used to control exposure in order to obtain patterns of code disc and metrology grating which are the core components of optical shaft encoder. But perforated film as photolithography shutter has many disadvantages such as taking too long time to perforate, easily making wrong code, lower reusable ratio. Mathematical models for resist property, luminous efficiency and exposure have been established by deducing their relations for avoiding the disadvantages, which provides the theory of using liquid crystal light valve (LCLV) replacing proforated film. Based on operating principles of LCLV and control theories of photolithography shutter, the principle diagram of control circuit of LCLV arrays has been designed according to theirs control principles. In the control system, LCLV arrays as photolithography shutter are realized by adopting DS75451 to drive them and using AT89C51 chip to control them. By photolithographic experiment, the patterns of code disc are good, the edges of lines are vertical, it indicates LCLV arrays as photolithography shutter may control exposure and light passing accords with the intending requires. It proves using LCLV arrays replacing perforated film as photolithography shutter is feasible completely.

Citation Download Citation

Yun Chen, Lihui Liang, and Huiyang He "The application of auto-controlled liquid crystal light valve arrays to photolithography shutter", Proc. SPIE 6024, ICO20: Optical Devices and Instruments, 60241Z (9 December 2005); https://doi.org/10.1117/12.666943

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KEYWORDS

Optical lithography

Camera shutters

Liquid crystals

Control systems

Light valves

Luminous efficiency

Lamps

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