Development of user-friendly software for the roughness measurement of ultra smooth surface

Huiyu Li; Yuhe Li; Qingxiang Li; Xiaohua Liao; Jinglin Zheng

doi:10.1117/12.676898

19 May 2006 Development of user-friendly software for the roughness measurement of ultra smooth surface

Huiyu Li, Yuhe Li, Qingxiang Li, Xiaohua Liao, Jinglin Zheng

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61502I (2006) https://doi.org/10.1117/12.676898
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

This paper describes the development of software used for the ultra smooth surface roughness measurement system, whose precision reaches nanometer level. The software mainly consists of two independent modules: the image acquisition and the roughness analysis modules. The first module controls the rotation of the phase-shifter and gathers images from the CCD camera. The process is repeated several times according to the means of calculating phase. The second module is used to analyze the sample's roughness. Firstly the images are loaded, and then the phase image is calculated and processed in the light of the unwrapping algorithm. Finally the roughness data are acquired by integrating the unwrapped phase image. The roughness carves on both x and y direction can be readily displayed and the roughness parameters are calculated and simultaneously shown. Then the three dimensional profile is displayed by employing the functions of OpenGL, and the parameter of the three dimensional roughness is also shown. All these results can be readily saved. The software is developed with VC++ 6.0, and has several characterizations as follows: it runs independently without any aid of other software; to depress the influence of noises, ten images are gathered at one time and averaged automatically; through loading image the software can discriminate that whether four-bucket or five-bucket method should be adopted, and choose the corresponding algorithm in the following calculations; the sample's three dimensional profile is also shown directly.

Citation Download Citation

Huiyu Li, Yuhe Li, Qingxiang Li, Xiaohua Liao, and Jinglin Zheng "Development of user-friendly software for the roughness measurement of ultra smooth surface", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61502I (19 May 2006); https://doi.org/10.1117/12.676898

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KEYWORDS

Software development

OpenGL

3D displays

Image processing

Visualization

Interferometers

Statistical analysis

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