Application of cellular neural networks in the measurement of line-width and line edge roughness

Hong-bo Li; Xue-zheng Zhao; Wei Chu; Ning Li

doi:10.1117/12.676727

23 February 2006 Application of cellular neural networks in the measurement of line-width and line edge roughness

Hong-bo Li, Xue-zheng Zhao, Wei Chu, Ning Li

Proceedings Volume 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 61504S (2006) https://doi.org/10.1117/12.676727
Event: 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2005, Xian, China

Abstract

The line-edges of the sample scanned by AFM is detected using cellular neural networks. Line-width, Line-width roughness and line edge roughness of line-structure are calculated respectively based on the analysis of the detected edge character. Since cellular neural network is characterized by high-speed parallel computation and easy to be implemented in hardware, it has more potential, comparing with other software technique, in the quick line-structure-parameters detection.

Citation Download Citation

Hong-bo Li, Xue-zheng Zhao, Wei Chu, and Ning Li "Application of cellular neural networks in the measurement of line-width and line edge roughness", Proc. SPIE 6150, 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 61504S (23 February 2006); https://doi.org/10.1117/12.676727

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