Paper
12 March 1986 a-Si:H Image Sensor: Some Aspects of Physics and Performance
K. Kempter
Author Affiliations +
Proceedings Volume 0617, Amorphous Semiconductors for Microelectronics; (1986) https://doi.org/10.1117/12.961081
Event: O-E/LASE'86 Symposium, 1986, Los Angeles, CA, United States
Abstract
A review is given of some aspects of a large-format image sensor which combines an a-Si:H thin-film sensor array with microelectronic chips for readout, interconnected on one substrate. Comparisons are made between the different thin-film photoconductor materials, the various noninjecting contacts for the sensor photodiodes and the circuits for readout as they have been proposed so far. A-Si:H is found to be a superior material for the sensors; however, the readout circuit must be carefully designed to obtain a satisfactory signal at the sensor output.
© (1986) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
K. Kempter "a-Si:H Image Sensor: Some Aspects of Physics and Performance", Proc. SPIE 0617, Amorphous Semiconductors for Microelectronics, (12 March 1986); https://doi.org/10.1117/12.961081
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Cited by 5 scholarly publications and 2 patents.
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KEYWORDS
Sensors

Image sensors

Switches

Electrodes

Interference (communication)

Capacitance

Thin films

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