Paper
15 June 2006 Commercialisation of full depletion scientific CCDs
Paul Jorden, Kevin Ball, Ray Bell, David Burt, Neil Guyatt, Kevin Hadfield, Paul Jerram, Peter Pool, Andrew Pike, Andrew Holland, Neil Murray
Author Affiliations +
Abstract
Following successful manufacture of small-format trial devices we have now designed and manufactured large-format scientific CCDs in high resistivity silicon ('high-rho'). These devices are intended for 'full depletion' operation as backside illuminated sensors for very high red wavelength sensitivity and X-ray imaging spectroscopy at extended energies. Devices of 2k*512 and 2k*4k format, with both single and dual stage output circuits have been manufactured and tested. Design considerations, test results, and commercial manufacturing considerations will be addressed.
© (2006) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul Jorden, Kevin Ball, Ray Bell, David Burt, Neil Guyatt, Kevin Hadfield, Paul Jerram, Peter Pool, Andrew Pike, Andrew Holland, and Neil Murray "Commercialisation of full depletion scientific CCDs", Proc. SPIE 6276, High Energy, Optical, and Infrared Detectors for Astronomy II, 627604 (15 June 2006); https://doi.org/10.1117/12.670174
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Cited by 13 scholarly publications.
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KEYWORDS
Silicon

Manufacturing

Charge-coupled devices

Modulation transfer functions

Sensors

Point spread functions

Prototyping

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