Noncontact measurement of irregular reflective surfaces

X. Liu; Y. Gao

doi:10.1117/12.716205

13 October 2006 Noncontact measurement of irregular reflective surfaces

X. Liu, Y. Gao

Proceedings Volume 6280, Third International Symposium on Precision Mechanical Measurements; 628023 (2006) https://doi.org/10.1117/12.716205
Event: Third International Symposium on Precision Mechanical Measurements, 2006, Urumqi, China

Abstract

A pencil beam interference based slope measurement method is investigated. A new pencil beam generator design, which consists of a single parallel plane plate made of calcite crystal, is proposed. The generator is simple and compact in structure. It is convenient to use for adjustment and has high stability. Based on the generator, a new pencil beam interferometer for surface slope and normal vector distribution measurement is developed. A new method for surface normal vector abstraction from interference patterns and a new algorithm for surface reconstruction from the surface slope and normal vector distribution data are proposed and examined. Experimental testing results are presented to verify the proposed design and methods for irregular reflective surface measurement.

Citation Download Citation

X. Liu and Y. Gao "Noncontact measurement of irregular reflective surfaces", Proc. SPIE 6280, Third International Symposium on Precision Mechanical Measurements, 628023 (13 October 2006); https://doi.org/10.1117/12.716205

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