Laser hole drilling process studied using laser speckle correlation

Mikael Sjödahl; Per Gren; Istvan Sárady; Natalia Miroshnicova

doi:10.1117/12.695845

15 September 2006 Laser hole drilling process studied using laser speckle correlation

Mikael Sjödahl, Per Gren, Istvan Sárady, Natalia Miroshnicova

Proceedings Volume 6341, Speckle06: Speckles, From Grains to Flowers; 63412M (2006) https://doi.org/10.1117/12.695845
Event: Speckle06: Speckles, From Grains to Flowers, 2006, Nimes, France

Abstract

This paper revisits defocused speckle correlation as a tool for measuring the response in metal sheets during percussion laser drilling processing. For the processing the 4th harmonic Nd:YAG wavelength (266 nm) was used in pulsed mode. It is shown that the method provides a cost efficient and robust alternative to speckle interferometry for the study of the small deformations that appear during laser processing. The accuracy was shown to be in the order of a few tens of μrads for the tilt component being measured which translates to a few nm in deflection when being spatially integrated. In the measurements deflections up to 50 nm was detected on the backside of silver and a copper sheet, respectively.

Citation Download Citation

Mikael Sjödahl, Per Gren, Istvan Sárady, and Natalia Miroshnicova "Laser hole drilling process studied using laser speckle correlation", Proc. SPIE 6341, Speckle06: Speckles, From Grains to Flowers, 63412M (15 September 2006); https://doi.org/10.1117/12.695845

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