Integration and characterization of SiN nanopores for single-molecule detection in liquid-core ARROW waveguides

M. I. Rudenko; D. Yin; M. Holmes; A. R. Hawkins; H. Schmidt

doi:10.1117/12.700479

14 February 2007 Integration and characterization of SiN nanopores for single-molecule detection in liquid-core ARROW waveguides

M. I. Rudenko, D. Yin, M. Holmes, A. R. Hawkins, H. Schmidt

Author Affiliations +

Proceedings Volume 6444, Ultrasensitive and Single-Molecule Detection Technologies II; 64440L (2007) https://doi.org/10.1117/12.700479
Event: SPIE BiOS, 2007, San Jose, California, United States

Abstract

We demonstrate a method for integrating silicon nitride nanopores in liquid core Anti Resonant Reflecting Optical Waveguides (ARROW) for single molecule electrical detection and control. We use a two-step integration process when a micropore is fabricated first, paving the way for subsequent nanopore integration in the first silicon nitride layer of the ARROW structure. Nanopores with dimensions as small as 11 nm were fabricated using a Focused Ion Beam shrinking process commensurate with single particle gating of viruses, proteins, ribosomes and other biomolecules.

Citation Download Citation

M. I. Rudenko, D. Yin, M. Holmes, A. R. Hawkins, and H. Schmidt "Integration and characterization of SiN nanopores for single-molecule detection in liquid-core ARROW waveguides", Proc. SPIE 6444, Ultrasensitive and Single-Molecule Detection Technologies II, 64440L (14 February 2007); https://doi.org/10.1117/12.700479

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available