Characteristics and prevention of pattern collapse in EUV lithography

Wook Chang; Eun-Jin Kim; Young-Min Kang; Seung-Wook Park; Chang-Moon Lim; Ki-Tak Won; Jai-Soon Kim; Hye-Keun Oh

doi:10.1117/12.712469

21 March 2007 Characteristics and prevention of pattern collapse in EUV lithography

Wook Chang, Eun-Jin Kim, Young-Min Kang, Seung-Wook Park, Chang-Moon Lim, Ki-Tak Won, Jai-Soon Kim, Hye-Keun Oh

Author Affiliations +

Proceedings Volume 6517, Emerging Lithographic Technologies XI; 65172S (2007) https://doi.org/10.1117/12.712469
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

Pattern collapse for line widths under 32 nm printed by extreme ultra-violet lithography (EUVL) is investigated by using commercial tools. Pattern collapse phenomenon occurs very often in actual process. Pattern collapse means that pattern is bending, peel-off, and break of the resist, thus it affects the production and yield of semiconductor. In this paper, we newly defined and investigated the critical aspect ratio. Pattern collapse happens if the critical aspect ratio is smaller than aspect ratio. Because EUV resist has smaller adhesive strength than currently available DUV and ArF resists, EUV resist easily collapse more easily than DUV resist does. This phenomenon is successfully modeled.

Citation Download Citation

Wook Chang, Eun-Jin Kim, Young-Min Kang, Seung-Wook Park, Chang-Moon Lim, Ki-Tak Won, Jai-Soon Kim, and Hye-Keun Oh "Characteristics and prevention of pattern collapse in EUV lithography", Proc. SPIE 6517, Emerging Lithographic Technologies XI, 65172S (21 March 2007); https://doi.org/10.1117/12.712469

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE