Flat-field calibration of CCD detector for long trace profiler

Jonathan L. Kirschman; Edward E. Domning; Keith D Franck; Steven C. Irick; Alastair A. MacDowell; Wayne R. McKinney; Gregory Y. Morrison; Brian V. Smith; Tony Warwick; Valeriy V. Yashchuk

doi:10.1117/12.732618

20 September 2007 Flat-field calibration of CCD detector for long trace profiler

Jonathan L. Kirschman, Edward E. Domning, Keith D Franck, Steven C. Irick, Alastair A. MacDowell, Wayne R. McKinney, Gregory Y. Morrison, Brian V. Smith, Tony Warwick, Valeriy V. Yashchuk

Author Affiliations +

Proceedings Volume 6704, Advances in Metrology for X-Ray and EUV Optics II; 67040J (2007) https://doi.org/10.1117/12.732618
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

The next generation of synchrotrons and free electron lasers requires x-ray optical systems with extremely high-performance, generally, of diffraction limited quality. Fabrication and use of such optics requires highly accurate metrology. In the present paper, we discuss a way to improve the performance of the Long Trace Profiler (LTP), a slope measuring instrument widely used at synchrotron facilities to characterize x-ray optics at high-spatial-wavelengths from approximately 2 mm to 1 m. One of the major sources of LTP systematic error is the detector. For optimal functionality, the detector has to possess the smallest possible pixel size/spacing, a fast method of shuttering, and minimal nonuniformity of pixel-to-pixel photoresponse. While the first two requirements are determined by choice of detector, the non-uniformity of photoresponse of typical detectors such as CCD cameras is around 2-3%. We describe a flat-field calibration setup specially developed for calibration of CCD camera photo-response and dark current with an accuracy of better than 0.5%. Such accuracy is adequate for use of a camera as a detector for an LTP with performance of ~0.1 microradian (rms). We also present the design details of the calibration system and results of calibration of a DALSA CCD camera used for upgrading our LTP-II instrument at the ALS Optical Metrology Laboratory.

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Jonathan L. Kirschman, Edward E. Domning, Keith D Franck, Steven C. Irick, Alastair A. MacDowell, Wayne R. McKinney, Gregory Y. Morrison, Brian V. Smith, Tony Warwick, and Valeriy V. Yashchuk "Flat-field calibration of CCD detector for long trace profiler", Proc. SPIE 6704, Advances in Metrology for X-Ray and EUV Optics II, 67040J (20 September 2007); https://doi.org/10.1117/12.732618

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