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This PDF file contains the front matter associated with SPIE Proceedings Volume 6715, including the Title Page, Copyright information, Table of Contents, Introduction, and the Conference and Symposium Committee listings.
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Actuators for Optical Beam Steering, Focusing, and Shaping
This paper presents the design, fabrication and operation principle of an optical beam steerer for laser fiber coupling based on a MEMS device. The MEMS chip consists on a bi-dimensional movable platform based on uni-dimensional comb drive actuation. An optical lens is assembled onto the mobile platform to focus and steer the light comping from a laser diode and couple it into an optical fiber. Assembly of a complete system and measurements were performed and compared to simulation results. Both the trajectory of the MEMS and resonance frewquency measurements agree with the simulated ones.
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This work deals with the application of parallel robots for the correction of defocus and coma optical aberrations in
the case study of the VST (VLT Survey Telescope) telescope, to be installed at the ESO observatory of Cerro
Paranal (Chile). The parallel robots are used to change position and orientation of the secondary mirror. The
secondary mirror positioning capability is a fundamental part in an active optics system, i.e. a closed loop control
system for the minimization of the telescope optical aberrations, where the outer optical feedback coming from the
wavefront sensor is used to generate references for the inner motion control loop of the secondary mirror
positioning robots. Two devices are presented: a 6-6 Stewart platform where both fixed and mobile platforms are
regular and similar hexagons whose vertexes belong to the same plane and are on a circle, and a two stages device
composed by a XY table plus a tilt platform. The basic theory of active optics corrections is presented. The
kinematics of both devices is solved in connection with the active optics application; first test data are presented.
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We report on micromirror arrays being developed for object selection in Multi Object Spectrographs for astronomical
applications. The micromirrors are etched in bulk single crystal silicon whereas the cantilever type
suspension is realized by surface micromachining. One micromirror element is 100μm × 200μm in size. The
micromirrors are actuated electrostatically by electrodes located on a second chip. The use of silicon on insulator
(SOI) wafers for both mirror and electrode chip ensures thermal compatibility for cryogenic operation. A system
of multiple landing beams has been developed, which passively locks the mirror at a well defined tilt angle
when actuated. The mechanical tilt angle obtained is 20° at a pull-in voltage of 90V. Measurements with an
optical profiler showed that the tilt angle of the actuated and locked mirror is stable with a precision of one arc
minute over a range of 15V. This locking system makes the tilt angle merely independent from process variations
across the wafer and thus provides uniform tilt angle over the whole array. The precision on tilt angle from
mirror to mirror measured is one arc minute. The surface quality of the mirrors in actuated state is better than
10nm peak-to-valley and the local roughness is around 1nm RMS. Preliminary cryogenic tests showed that the
micromirror device sustains 120K without any structural damage.
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The ability to perform non-mechanical optical beam steering is of critical importance in laser
communication and remote sensing; it is as vital as a phased-array antenna is for RADAR. This challenge
has been addressed in the past primarily by liquid crystal (LC) devices. To date, a peak optical steering
angle of ±4.53 degrees has been achieved, but it is limited by the fringing field effect. This limiting effect
has been circumvented by depositing a thermo-optic material, polydimethlyoxane (PDMS), on a stair-step-approximated,
blazed grating. The phase gradient can be controlled, while the material's index of
refraction remains homogeneous throughout. The design, fabrication, simulation and performance of such
a prototype, reflection-mode device is analyzed. Angular control between orders separated by 0.75 and
1.2° is experimentally demonstrated. An analysis of the efficiency and response time (2.2 μs) of the device
is also presented. This approach promises circumvention of the fringing field effect, as well as much
simpler and less-expensive fabrication.
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The proposed passive thermal compensation mechanism is intended for maintaining the stability of performance
parameters of an optomechatronic system over a wide operating temperature range. When integrated with airborne and
military optomechatronic devices, this mechanism will also ensure their proper operation in harsh environments,
characterized by exposure of the equipment to vibrations and shocks.
Existing mechanisms designed for such purposes are only partially compliant.
The proposed mechanism presents a simple structure consisting of two links and a frame. One end of each link is joined
to the frame; the links are joined together at their other ends. All of the joints are hinged. At constant temperature, this
structure has a zero degrees of freedom. One of the links is made from a material having a Coefficient of Thermal
Expansion (CTE) different from that of the frame and the other link. When ambient temperature changes, the lengths of
the links change in proportion to their respective CTE values. This results in one of the links performing a rotational
motion.
Exploitation of these phenomena allows the mechanism described herein to act as a motion amplifier. The amplifier
Input is a small dimensional change in the links, caused by temperature change and its output is the rotational motion of
The output link. The amplification is according to the rules of lever dynamics.
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In this work, compact auto focus actuator moving lens module in the camera phone is developed by applying
piezoelectric single crystal. This actuator is reduced in the size by applying the piezoelectric single crystal. The size of
developed actuator (12*9.2*5.6 mm3) is reduced to 60.4% compared with the actuator using general voice coil motor.
From the performance test, the developed actuator has moving stroke of 0.16mm, full stroke hysteresis of 5μm, settling
time of 150msec, maximum overshoot of 7%, and unit step motion of 1μm. The manufacturing method for proposed
actuator can be applicable to the nano-millimeter resolution and sub-millimeter stroke positioning system using for
precision measuring microscope.
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As one category of light-driven actuators, we propose a light-actuated device which outputs sound. To verify the
feasibility of the concept of the light-actuated speaker, we performed experiments using a scheme where the light energy
is first converted into an electrical current which then drives the connected speaker. The method seems rather indirect,
but given the efficiency of the solar cell, which can reach around 25% with the use of an appropriate wavelength, and
with the adoption of impedance matching between the solar cell and the speaker, a high overall conversion efficiency is
expected. With its realization, it would be possible to create a sound system that is wireless and can be controlled
remotely without the need of a power supply which will provide advantages over the conventional electronic
transmission such as wireless operation with no external power source, and precise control of listening area compared to
radio transmission. Possible applications include a sound guidance system for the visually impaired.
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Micro Electro Mechanical Systems (MEMS) are among the new and emerging technologies of the future and have
many applications in different disciplines. This study presents the dynamic characterization methods that we use to
identify the modal parameters of a MEMS device and also the techniques that can be implemented to change the modal
parameters. A micro scanner mirror was chosen as the case study to demonstrate the developed methodologies. Initially,
the micro mirror was dynamically characterized using experimental modal analysis techniques to identify the modal
parameters such as resonance frequencies and mode shapes. Then, it was introduced in a velocity feedback control loop
to alter the effective damping of the structure. This method proves to be a very efficient method to alter the modal
damping of a micro structure, especially when high quality factors are required for MEMS applications.
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Mobile micro-robots are needed for micro positioning, manipulation or manufacturing small components, or
sensing in chemical and biological environments. The design of mobile micro-robots poses challenges in terms
of fabrication, actuation and sensing. Current approaches require complex assembly or sophisticated MEMS
processes, to obtain actuators with a high energy density. Furthermore, the energy source for locomotion has
either to be carried onboard (which by itself poses additional miniaturization challenges) or be remotely located
so that the energy is transferred through tethered cables or wirelessly. In this paper, we propose a radically
different approach: the micro-robot consists of a single piece of shape memory alloy (SMA) suitably shaped to
perform inchworm-like locomotion, and remotely actuated by a laser beam. We report the modeling and design
of an SMA inchworm like micro-robot, and the first experimental results.
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In this paper, a cantilever-based manipulator using (1-x)Pb(Mg1/3Nb2/3)O3-xPbTiO3 (PMN-PT) single-crystal relaxor
ferroelectric material is presented. We report the design of a novel piezoelectric multi-degree-of-freedom motion
cantilever. The structure has interdigitated electrode (IDE) on the top and bottom surfaces of the cantilever and possesses
both longitudinal and flexural actuation capabilities. PMN-PT materials are ideal for actuator applications since they
exhibit a very high piezoelectric strain. We separately pattern interdigitated electrode (IDE) on the top and bottom
surfaces of a single crystal cantilever beam. Furthermore, we propose a novel L-shaped cantilever manipulator that can
provide up to four-degrees of freedom motion. The small and planar structure has potential applications in optical beam
steering systems and nano-manipulators inside a scanning electron microscope.
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Building on the technology developed to make deformable secondary mirrors for large telescopes, we show that a new
breed of tip-tilt and low order deformable mirrors can be designed to satisfy the need of a large number of traditional
astronomical AO systems that rely on a high order piezo deformable mirror compounded with a tip-tilt mirror to
compensate for the large image motion present in the atmosphere. Using a new paradigm, we are developing a compact
50mm deformable mirror which benefits from a large computer power used to implement powerful control algorithms
that allow speeding up the mirror response. Freed from the space and geometrical constraints that deformable secondary
mirrors must respect, our mirror also displays elegant simplicity and compactness.
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An optical driven actuator has a feature of a non-contact for applying light energy remotely. A laser trapping and a laser
manipulation for small particles are powerful tool for nano-micro bio-technology. Nowadays, vectorial vortex attracts
the attention of a laser trapping and a laser manipulation for small particles because it can rotate the particle by
polarization. In this paper, a spatially variant polarized beam called vectorial vortex array is proposed. The mechanism
of generation of the spatially variant polarized beam is examined the properties of polarization on beam profile. The
generation mechanism of the beam consists of phenomena of the polarization and the interference. The vectorial vortex
array is converted to different spatially variant polarized beams by adding a half wave plate. Their polarized beams are
shown in experimentally.
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Optical-based Micromanipulation and Related Detection and Tracking Systems
Over the last several years, MEMS deformable mirror technology has evolved from a specialized wavefront control
device used by only a few select research organizations to a low cost and high performance product that can now
be considered for inclusion in certain commercial machines and instrumentation. In a typical MEMS deformable
mirror, a membrane is suspended over a pattern of electrostatic actuators, with the possibility of additional
microstructures to affect the membrane movement. Because the electrostatic actuators in the MEMS deformable
mirrors can only pull on the membrane surface and because the shape of the membrane itself is determined
by the associated membrane mechanics, there are limitations and tradeoffs in the achievable shape corrections.
Our research seeks to clarify and define: (1) the actual wavefront correcting capabilities of the different MEMS
deformable mirror designs and (2) how to effectively design optical systems to best utilize this new technology.
After describing a finite element model of a three layer MEMS deformable mirror technology, a method for
integrating high fidelity models of deformable mirrors with commercial optical design and simulation software is
described. We then suggest a design methodology for both evaluating the performance of the deformable mirror
and optimizing the optical system itself to best utilize the MEMS deformable mirror such that the static optical
elements are tailored to the specific shape correcting capabilities of the deformable mirror. Simulated results are
presented of a defocus case study with more than 7 waves of correction, with the final results analyzed.
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High-speed, high-resolution, miniature photospectroscopy techniques suited for a microfluidic platform
enable rapid, cost-effective and efficient assays for use in the clinic, or home, in the field with emergency
medical personnel, or on biochemical production lines. We demonstrated an innovative MEMS tunable
diffraction grating implemented for spectroscopic measurements requiring simple optics and signal processing. The
device is composed of a polydimethylsiloxane (PDMS) microbridge with a nanoimprinted grating pattern on the top
surface. MEMS silicon comb drive actuators mechanically strain the microbridge in order to variably tune the grating
period. Our innovative nano photonic technology incorporating the tunable grating may guide future
advancements of wavelength-discriminating detection for the identification and quantification of chemical
and biological species.
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In this paper a novel scheme for optical manipulation of objects utilizing the frequency difference of two separate
lasers is proposed. In this scheme interference fringes moving at constant speed generated from two counter-propagating
laser beams are expected to transport small particles trapped. For this purpose a highly stable light source is needed. On
the other hand, actuators are nowadays widely used for controlling the position of or moving an object. Among them,
piezoelectric actuators are commonly utilized to accurately control the angle of a diffraction grating in an external cavity
laser diode (ECLD). However, conventional use of piezoelectric actuators in ECLDs causes difficulty in continuous
scanning of the wavelength of an ECLD. Here, the 'tandem ECLD' utilizing an electromagnetically-driven actuator
instead of a piezoelectric actuator is proposed based on the theoretical calculation that, when two separate lasers with
different wavelengths sharing a common perturbation term are combined, the wavelength of the combined laser can be
controlled in terms of the frequency difference of the two lasers. The wavelength shift of a prototype of the 'tandem
ECLD' with respect to the current applied to the electromagnetically-driven actuator is measured. It is shown that the
wavelength tuning method of an laser diode (LD) using an electromagnetically-driven actuator at low voltage exhibits
equivalent performance (2.51nm wavelength shift when 2.58mA applied) to the conventional method that causes
wavelength tunability using a piezoelectric actuator.
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Optical waveguides used as a local light source along a fluidic channel have proven to be an effective approach
to detecting cells in the field of flow-cytometry. One challenge, however, has been a simple integration of
optical waveguides with the fluidic channel. We employ the use of femtosecond laser-writing process to pattern a
waveguide in the bulk of a fused-silica glass substrate housing a fluidic channel. We demonstrate an in-situ scheme
for detecting sub-millimeter components based on such a monolithically fabricated device. By illuminating the
waveguide and collecting the light signal past the channel, we detect opaque and transparent components between
300 - 500 μm in size, as each moves along the channel. Both an opaque square chip and a transparent bead
attentuate the signal by more than 95% primarily due to reflection and refraction respectively. The signature
of a transparent bead additionally shows attenuated peaks which we attribute to normal incidence of light from
the waveguide. The projected sizes of the parts are determined with less than 1% uncertainty. We conclude that
the femtosecond laser produced waveguides in fused-silica glass are a viable option for the detection of certain
kinds of sub-millimeter components. This approach holds the prospects of fabricating complex three-dimensional
networks of waveguides monolithically.
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Optical-based Actuation and Microassembly of Optical Components
New light-driven actuators based on films of polymer polyvinylidene fluoride are described. The actuators use the
photomechanical bending of the polymer film caused by low power laser radiation. The photomechanical effect
combines physical mechanisms, such as anisotropic thermal expansion, converse piezoelectric mechanism, photovoltaic
and pyroelectric, while thermal expansion is dominant for slow motion. Mechanical vibrations of the strips of the
photomechanical polymer were observed with periodic pulsed laser excitation. The resonance frequency is inversely
proportional to the square of the length of the strip, in agreement with the theory. Resonance frequency measurements
were used to determine the modulus of elasticity of the films, which was close to 3.0x109 Pa. Three possible applications
are a photonic switch, an adaptive mirror, and an auto-oscillator. The proposed actuators have a potential of being used
as the components of future light-driven micro/nano systems.
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In the present paper, two arm micromanipulator for handling and/or assembling of minute objects in a fixed view by use
of a pantograph mechanism is proposed and its performance is discussed. The pantograph mechanism has three
parallelogram in the mechanism. In case of the pantograph mechanism, when two input actuators of the pantograph
mechanism has a linear motion, one of the output link of the mechanism has a motion with constant orientation. And
when an input link of the mechanism has a circular motion and when the output link has an endeffector with same length
of a radius of the circular motion, the top position of the endeffector does not move. Therefore, if we use the manipulator
as cell treatment manipulator, the view of motion area of the top of the endeffector does not move, only the direction of
the output link of the endeffector can change like a circular motion. This motion is very useful for treating cells, electric
micro devices, etc. Then, first, the motion principle and the motion function of the mechanism are explained. Second, the
performance of the manipulator and, especially, the positioning precision of the manipulator are discussed.
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This paper describes the fabrication and, in particular, the assembly processes of a miniaturized micro-optical system, to be integrated on a hybrid flexible module, which hosts also electronics and microsensors. The whole module was conceived to be mass-produced in order to be distributed in skin-like structures for robotic tactile applications. Nevertheless, it is generally suitable for sensing applications where the flexibility and the thickness of the sensing network are primary requirements. The micro-optical system works as a part of an optoelectronic transducer where electric signals, generated by tactile MEMS sensors, are computed by a microcontroller that drives the micro-optical system. This consequently generates optical radiation, by means of integrated light emitting diodes (LEDs), to be coupled into optical fibers, which waveguide signals to a CMOS optical sensor. Micro-machining and micro-assembly processes of miniaturized components are critical steps in order to fabricate many of these modules according to the application requirements.
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An optical driven actuator has a feature of a non-contact for applying light energy remotely. It consists of a neodymium
magnet as a movement, a ferrite magnet, two blocks of graphite and temperature sensitive ferrite. The neodymium
magnet is levitated by magnetic force between the neodymium and ferrite magnet. When laser is irradiated on
temperature sensitive ferrite, a magnetic force decreases by photo-thermal effect. As a result, the movement can be
controlled in three-dimensional area.
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