Soft lithographic fabrication of microresonators

Andrea M. Armani; Kerry J. Vahala

doi:10.1117/12.754326

10 October 2007 Soft lithographic fabrication of microresonators

Andrea M. Armani, Kerry J. Vahala

Proceedings Volume 6717, Optomechatronic Micro/Nano Devices and Components III; 671706 (2007) https://doi.org/10.1117/12.754326
Event: International Symposium on Optomechatronic Technologies, 2007, Lausanne, Switzerland

Abstract

As new synthetic, low-loss polymers are developed, polymer optical cavities are experiencing a revolution, in both fabrication design and functionality. Recently a fabrication technique was developed which enabled planar arrays of polymeric resonators to achieve cavity Q factors greater than 1 million. This molding technique can be used to fabricate resonators from polymers which have either thermal or UV curing mechanisms. These resonant cavities demonstrate quality factors which are competitive with photonic crystals and microdisk resonators and have applications in telecommunications and biological sensing.

Citation Download Citation

Andrea M. Armani and Kerry J. Vahala "Soft lithographic fabrication of microresonators", Proc. SPIE 6717, Optomechatronic Micro/Nano Devices and Components III, 671706 (10 October 2007); https://doi.org/10.1117/12.754326

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