Lateral interactions between standard cells using pattern matching

Lynn Tao-Ning Wang; Andrew R. Neureuther

doi:10.1117/12.746758

16 November 2007 Lateral interactions between standard cells using pattern matching

Lynn Tao-Ning Wang, Andrew R. Neureuther

Proceedings Volume 6730, Photomask Technology 2007; 673010 (2007) https://doi.org/10.1117/12.746758
Event: SPIE Photomask Technology, 2007, Monterey, California, United States

Abstract

This paper proposes a novel method of identifying interactions between neighboring standard cells via fast-CAD pattern matching. Studies of cell-to-cell interactions for both metal 1 and poly layouts are made for selected samples from libraries for 130 and 90 nm generations provided under an NDA agreement by ST Microelectronics. Both simulation and pattern matching are utilized to identify and quantify hot-spots. The physical basis for pattern matching is described. In validating pattern matching compared to full simulation, changes in linewidth for a fixed defocus setting varied quadratically with pattern match factor and can be modeled by a parabolic equation with an r-squared value of 0.77. Results demonstrate that there is a considerable best-to-worst variation of 4-7% in the linewidth among neighbors, which is produced through a focus swing of 0.58 Rayleigh Units (RU). The focus swing is oscillatory with cell separation distance, and a slight shift in spacing on the order of 0.5 λ /NA can mitigate lateral interaction effects.

Citation Download Citation

Lynn Tao-Ning Wang and Andrew R. Neureuther "Lateral interactions between standard cells using pattern matching", Proc. SPIE 6730, Photomask Technology 2007, 673010 (16 November 2007); https://doi.org/10.1117/12.746758

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available