Investigation of airborne molecular contamination adsorption rate as storage materials in mask

Chul-Kyu Yang; Han-Sun Cha; Sin-Ju Yang; Ju-Hyun Kang; Jin-Ho Ahn; Kee-Soo Nam

doi:10.1117/12.746675

30 October 2007 Investigation of airborne molecular contamination adsorption rate as storage materials in mask

Chul-Kyu Yang, Han-Sun Cha, Sin-Ju Yang, Ju-Hyun Kang, Jin-Ho Ahn, Kee-Soo Nam

Proceedings Volume 6730, Photomask Technology 2007; 67301D (2007) https://doi.org/10.1117/12.746675
Event: SPIE Photomask Technology, 2007, Monterey, California, United States

Abstract

The haze issue has gradually increased in the 65 nm node technology and beyond. This issue has been reporting that it is caused by chemical reaction among ions like SO₄^2-, NH₄⁺ and aromatic hydrocarbon compounds (AHCs) such as butylated hydroxy toluene (BHT), toluene and etc. on mask by 193 nm laser in general. This haze growth causes defects with accumulation of exposure energy. Finally, it decreases the lifetime of photomask with an increase in defects. The source of this haze is generated from storage materials as well as chemical residue in the photomask process. Therefore, we investigated the adsorption rate of airborne molecular contamination (AMC) on each layer with storage materials which were assumed to be the source of the haze. We analyzed adsorbed ions and volatile organic compounds (VOCs) on each layer to verify the effects of storage materials for some storage periods by automatic thermal desorption gas chromatography/mass spectrometer (ATD GC/MS) and ion chromatography (IC). Also, we investigated the contact angle of each layer as AMC concentration of storage materials. From the experimental results, we confirmed that the adsorption rate of AMC was different on each layer as storage materials.

Citation Download Citation

Chul-Kyu Yang, Han-Sun Cha, Sin-Ju Yang, Ju-Hyun Kang, Jin-Ho Ahn, and Kee-Soo Nam "Investigation of airborne molecular contamination adsorption rate as storage materials in mask", Proc. SPIE 6730, Photomask Technology 2007, 67301D (30 October 2007); https://doi.org/10.1117/12.746675

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KEYWORDS

Thin films

Ions

Adsorption

Photomasks

Air contamination

Quartz

Semiconducting wafers

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