Simultaneous model-based main feature and SRAF optimization for 2D SRAF implementation to 32 nm critical layers

Ayman Yehia; Alexander Tritchkov

doi:10.1117/12.747448

30 October 2007 Simultaneous model-based main feature and SRAF optimization for 2D SRAF implementation to 32 nm critical layers

Ayman Yehia, Alexander Tritchkov

Author Affiliations +

Proceedings Volume 6730, Photomask Technology 2007; 67302K (2007) https://doi.org/10.1117/12.747448
Event: SPIE Photomask Technology, 2007, Monterey, California, United States

Abstract

Sub-resolution Assist Feature (SRAF) insertion is one of the most important Resolution Enhancement Techniques (RET) for the 65 nm, 45 nm nodes and beyond. In this paper, we are proposing a novel approach for the optimum placement of 2D SRAF structures using state of the art Calibre RET flow. In this approach, the optimal SRAF shapes are achieved simultaneously during the OPC step. The SRAF and main features are optimized to account for their edge placement and process window metrics (aerial image slope/contrast, out of focus/dose EPE, etc...). The resulting mask shapes deliver some of the properties that can be obtained using the Inverse Lithography Techniques (ILT), such as excellent Process Window Performance, while there is almost no impact on the runtime. The implemented model-based optimization flow remains compatible with the current OPC production flows.

Citation Download Citation

Ayman Yehia and Alexander Tritchkov "Simultaneous model-based main feature and SRAF optimization for 2D SRAF implementation to 32 nm critical layers", Proc. SPIE 6730, Photomask Technology 2007, 67302K (30 October 2007); https://doi.org/10.1117/12.747448

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