Mask protection from a haze during shipping and storage

T. Umeda; H. Kawashima D.V.M.; T. Miho; K. Moriya

doi:10.1117/12.746358

14 November 2007 Mask protection from a haze during shipping and storage

T. Umeda, H. Kawashima D.V.M., T. Miho, K. Moriya

Proceedings Volume 6730, Photomask Technology 2007; 67304Q (2007) https://doi.org/10.1117/12.746358
Event: SPIE Photomask Technology, 2007, Monterey, California, United States

Abstract

We searched for low-outgassing and electroconductive polymer, found that polycarbonate with carbon fiber (PC+CF) was good material as mask case. The amount of gas generation from PC+CF was less than 1/10 of the conventional PMMA material. We also measured the performance of chemical absorbent (PureAID^®) too. This absorbent was effective in removing generated carbon gas from the case and penetrated acid, base and carbon (ABC) gasses into it. The PureAID^® mainteined clean condition in the case while shipping and storage. Functional filter was designed for mask shipping by air plane. The functional filter removed more than 90% ABC gasses. We recommend that the case for mask protection from a haze should adopt low-outgassing polymer composition, chemical absorbent and functional filter. RSP6025-A mask shipper and new concept of RSP150 are adopted these items.

Citation Download Citation

T. Umeda, H. Kawashima D.V.M., T. Miho, and K. Moriya "Mask protection from a haze during shipping and storage", Proc. SPIE 6730, Photomask Technology 2007, 67304Q (14 November 2007); https://doi.org/10.1117/12.746358

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