Study on defect detection of IC wafer based on morphology

Alin Hou; Wen Zhou; Guangming Cui; Dongcheng Shi; Kun Xu; Lihong Zhang; Jie Liu

doi:10.1117/12.759560

29 November 2007 Study on defect detection of IC wafer based on morphology

Alin Hou, Wen Zhou, Guangming Cui, Dongcheng Shi, Kun Xu, Lihong Zhang, Jie Liu

Proceedings Volume 6833, Electronic Imaging and Multimedia Technology V; 683334 (2007) https://doi.org/10.1117/12.759560
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

With the development of the micro-processing, silicon material technique, the silicon structural design, mass production, the scientific researches on integrated circuit have been developed rapidly. Defect detection and fault diagnosis as critical design requirements is necessary to achieve high-quality, cost-effective multichip systems. An increasingly difficult task, however, is the inherent need to accurately locate, indentify the defects within the microchip. A method of defect detection of IC wafer have been investigated using mathematical morphology. Firstly, the differential charts of the pending images and the intact image of IC wafer are computed and digitized to two gray levels, i.e. black and white. Secondly, the brightness of the pending images have been transformed to the same brightness as that of intact image in order to make the arithmetics is robust for various illumination conditions. Next, the defects on the binary image of differential chart can be found and dealt with mathematical morphology. Finally, several representative characteristics are proposed to extract and describe the defects of IC wafer image, for example perimeter, area, macro axis, minor axis, eccentricity ratio, centroid, circularity and rectangular degree, etc.

Citation Download Citation

Alin Hou, Wen Zhou, Guangming Cui, Dongcheng Shi, Kun Xu, Lihong Zhang, and Jie Liu "Study on defect detection of IC wafer based on morphology", Proc. SPIE 6833, Electronic Imaging and Multimedia Technology V, 683334 (29 November 2007); https://doi.org/10.1117/12.759560

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available