High Q microring resonator in silicon-on-insulator rib waveguides

Qingzhong Huang; Jinzhong Yu; Shaowu Chen; Xuejun Xu

doi:10.1117/12.760218

8 January 2008 High Q microring resonator in silicon-on-insulator rib waveguides

Qingzhong Huang, Jinzhong Yu, Shaowu Chen, Xuejun Xu

Proceedings Volume 6838, Optoelectronic Devices and Integration II; 68380J (2008) https://doi.org/10.1117/12.760218
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

A high quality (Q) factor microring resonator in silicon-on-insulator rib waveguides was fabricated by electron beam lithography, followed by inductively coupled plasma etching. The waveguide dimensions were scaled down to submicron, for a low bending loss and compactness. Experimentally, the resonator has been realized with a quality factor as high as 21,200, as well as a large extinction ratio 12.5dB at telecommunication wavelength near 1550nm. From the measured results, propagation loss in the rib waveguide is determined as low as 6.90dB/cm. This high Q microring resonator is expected to lead to high speed optical modulators and bio-sensing devices.

Citation Download Citation

Qingzhong Huang, Jinzhong Yu, Shaowu Chen, and Xuejun Xu "High Q microring resonator in silicon-on-insulator rib waveguides", Proc. SPIE 6838, Optoelectronic Devices and Integration II, 68380J (8 January 2008); https://doi.org/10.1117/12.760218

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