Laser alteration of the mechanical properties of photostructurable glass-ceramic

J. Stillman; J. Judy; H. Helvajian

doi:10.1117/12.761867

17 March 2008 Laser alteration of the mechanical properties of photostructurable glass-ceramic

J. Stillman, J. Judy, H. Helvajian

Proceedings Volume 6879, Photon Processing in Microelectronics and Photonics VII; 68790E (2008) https://doi.org/10.1117/12.761867
Event: Lasers and Applications in Science and Engineering, 2008, San Jose, California, United States

Abstract

Photostructurable glass-ceramics (PSGCs) present an attractive alternative to silicon as substrates for microfabrication. Moving a laser beam with a focal volume a few microns across and a few tens of microns high through a transparent PSGC induces a cascade of reactions that results in selective crystallization in the laser-exposed regions. The process offers excellent 3-D shaping control. Crystal formation alters many material properties, including opacity, index of refraction, etch rates, density, stiffness, and strength. Presented here are the results of bulk mechanical measurements of the mass density and the velocity of sound in several phases of Foturan, a commercially available PSGC. The measurements are nondestructive and easily repeatable at many stages of processing. From the velocity and the mass density, we calculated the elastic modulus for each Foturan phase. The measured samples included native, amorphous Foturan; exposed Foturan that was not thermally treated; and exposed, thermally treated Foturan. Results show that Foturan becomes somewhat stiffer with higher crystal content; the elastic modulus of Foturan rises from about 78 GPa in the original amorphous glass state to about 88 GPa in a crystal-rich, exposed, baked state. The speed of sound in Foturan rises from about 5.8 km/s to 6.1 km/s.

Citation Download Citation

J. Stillman, J. Judy, and H. Helvajian "Laser alteration of the mechanical properties of photostructurable glass-ceramic", Proc. SPIE 6879, Photon Processing in Microelectronics and Photonics VII, 68790E (17 March 2008); https://doi.org/10.1117/12.761867

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available