Radiation-induced defect formation and reactivity of model TiO2 capping layers with MMA: a comparison with Ru

B. V. Yakshinskiy; M. N. Hedhili; S. Zalkind; M. Chandhok; Theodore E. Madey

doi:10.1117/12.772798

21 March 2008 Radiation-induced defect formation and reactivity of model TiO₂ capping layers with MMA: a comparison with Ru

B. V. Yakshinskiy, M. N. Hedhili, S. Zalkind, M. Chandhok, Theodore E. Madey

Author Affiliations +

Proceedings Volume 6921, Emerging Lithographic Technologies XII; 692114 (2008) https://doi.org/10.1117/12.772798
Event: SPIE Advanced Lithography, 2008, San Jose, California, United States

Abstract

Our goal is to provide insights into surface processes that affect the reflectivity and lifetimes of TiO₂ and Ru-capped multilayer mirrors used in extreme ultraviolet (EUV) lithography. Several surface-sensitive ultrahigh-vacuum techniques are used to characterize thermally-induced and electron-induced surface reactions of methyl methacrylate (MMA), a model for hydrocarbons found in EUV lithography vacuum chambers; low-energy electron beams are used to mimic excitations initiated by EUV radiation. Carbon film growth is measured on TiO₂ surfaces during electron bombardment (at 20 eV and 100 eV) in MMA vapor; C growth rates are compared on Ru surfaces. The initial rates on the clean surfaces are very different: a C film grows more rapidly on TiO₂ than on Ru. However, the limiting growth rates are the same for C thicknesses greater than ~1 to 1.5 nm, when MMA interacts with a C film. Irradiation of the C films in O₂ gas, or in MMA + O₂, has a mitigating effect on TiO₂ surfaces.

Citation Download Citation

B. V. Yakshinskiy, M. N. Hedhili, S. Zalkind, M. Chandhok, and Theodore E. Madey "Radiation-induced defect formation and reactivity of model TiO₂ capping layers with MMA: a comparison with Ru", Proc. SPIE 6921, Emerging Lithographic Technologies XII, 692114 (21 March 2008); https://doi.org/10.1117/12.772798

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available