The role of plasmon-polaritons and waveguide modes in surface modification of semiconductors by ultrashort laser pulses

G. A. Martsinovsky; G. D. Shandybina; D. S. Smirnov; S. V. Zabotnov; L. A. Golovan; V. Yu. Timoshenko; P. K. Kashkarov

doi:10.1117/12.786844

15 January 2008 The role of plasmon-polaritons and waveguide modes in surface modification of semiconductors by ultrashort laser pulses

G. A. Martsinovsky, G. D. Shandybina, D. S. Smirnov, S. V. Zabotnov, L. A. Golovan, V. Yu. Timoshenko, P. K. Kashkarov

Author Affiliations +

Proceedings Volume 6985, Fundamentals of Laser Assisted Micro- and Nanotechnologies; 698502 (2008) https://doi.org/10.1117/12.786844
Event: Fundamentals of Laser Assisted Micro- and Nanotechnologies, 2007, St. Petersburg, Russian Federation

Abstract

Polarization-dependent ripples were formed at silicon surfaces under femtosecond laser irradiation. Proposed theoretical model describes changes in optical response of semiconductor surface, induced by generation of nonequilibrium electron-hole plasma, and explains mechanism of surface polaritons and waveguide modes exciatation during femtosecond laser pulse action.

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G. A. Martsinovsky, G. D. Shandybina, D. S. Smirnov, S. V. Zabotnov, L. A. Golovan, V. Yu. Timoshenko, and P. K. Kashkarov "The role of plasmon-polaritons and waveguide modes in surface modification of semiconductors by ultrashort laser pulses", Proc. SPIE 6985, Fundamentals of Laser Assisted Micro- and Nanotechnologies, 698502 (15 January 2008); https://doi.org/10.1117/12.786844

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