Calibration of a soft x-ray projection system

Robert Schmitt; Bjoern Damm; Raimund Volk

doi:10.1117/12.792974

29 August 2008 Calibration of a soft x-ray projection system

Robert Schmitt, Bjoern Damm, Raimund Volk

Proceedings Volume 7066, Two- and Three-Dimensional Methods for Inspection and Metrology VI; 70660J (2008) https://doi.org/10.1117/12.792974
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

Recently, X-ray computer tomography (XCT), as already established for medical applications has been utilized for production metrology. The ability to perform non-destructive testing methods on prototypes provides a huge potential for the reduction of inspection time for first sample release testing. While today's XCT devices focus on transilluminating the object and generate 4D-voxeldata, the possibility to focus only on the edges of objects and therefore on the cast shadow of the object on the detector to measure form tolerances is presented. This paper will focus on edge detection algorithms as well as new methods to calibrate a soft X-ray projection system to be able to measure form tolerances. In contrast to form measurement instruments which are based on visible light and a telecentric optical path, new algorithms to calibrate the soft X-ray measurement instrument are being developed because of the divergent ray distribution of the soft X-rays. The advantage of soft X-rays, compared to visible light, is that they are not influenced by residues of the manufacturing process, e.g. cooling lubricant, which allows a robust analysis of the outer object form. An algorithm for robust edge detection will be introduced and the correlation between the precision of the edge algorithm and strategies developed to calibrate the shaft measurement instrument are shown, which is crucial to reach the targeted low measurement uncertainty.

Citation Download Citation

Robert Schmitt, Bjoern Damm, and Raimund Volk "Calibration of a soft x-ray projection system", Proc. SPIE 7066, Two- and Three-Dimensional Methods for Inspection and Metrology VI, 70660J (29 August 2008); https://doi.org/10.1117/12.792974

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