Surface and material characteristics of Ga2O3 thin films on GaAs

Ping-Fong Huang; Yen-Ting Chen; H. Y. Lee; Zhe Chuan Feng; Hao-Hsiung Lin; Weijie Lu

doi:10.1117/12.795535

29 August 2008 Surface and material characteristics of Ga2O3 thin films on GaAs

Ping-Fong Huang, Yen-Ting Chen, H. Y. Lee, Zhe Chuan Feng, Hao-Hsiung Lin, Weijie Lu

Proceedings Volume 7067, Advances in Thin-Film Coatings for Optical Applications V; 70670M (2008) https://doi.org/10.1117/12.795535
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

Surface and material properties of dielectric Ga₂O₃ thin films deposited onto GaAs substrate with different annealing temperature were studied via a variety of techniques, including X-ray diffraction (XRD), X-ray Photoelectron Spectroscopy (XPS), scanning electron microscope (SEM) and energy dispersive X-ray spectroscopy (EDX). The effects of annealing are investigated. The increase of ratio of oxygen to gallium assuredly as the annealing temperature increased was found. The relationship between the interface quality and annealing temperature is identified.

Citation Download Citation

Ping-Fong Huang, Yen-Ting Chen, H. Y. Lee, Zhe Chuan Feng, Hao-Hsiung Lin, and Weijie Lu "Surface and material characteristics of Ga2O3 thin films on GaAs", Proc. SPIE 7067, Advances in Thin-Film Coatings for Optical Applications V, 70670M (29 August 2008); https://doi.org/10.1117/12.795535

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available