Multifunctional automatic tester for optical storage and lithography

Yongtao Fan; Wendong Xu; Chen Lu; Qian Liu; Chuanfei Guo

doi:10.1117/12.822594

19 March 2009 Multifunctional automatic tester for optical storage and lithography

Yongtao Fan, Wendong Xu, Chen Lu, Qian Liu, Chuanfei Guo

Proceedings Volume 7125, Eighth International Symposium on Optical Storage and 2008 International Workshop on Information Data Storage; 712522 (2009) https://doi.org/10.1117/12.822594
Event: Eighth International Symposium on Optical Storage and 2008 International Workshop on Information Data Storage, 2008, Wuhan, China

Abstract

Measurement technology plays an important role in the area of optical storage, a multifunctional quasi-dynamic static optical recording tester, which can also be used as nanometer laser direct writing lithography system, is designed and constructed for optical storage in this paper. The primary characteristics of the system are presented in detail, some experimental results are also given to show that the tester perform successfully, acting as a research platform for both optical storage and laser direct writing lithography.

Citation Download Citation

Yongtao Fan, Wendong Xu, Chen Lu, Qian Liu, and Chuanfei Guo "Multifunctional automatic tester for optical storage and lithography", Proc. SPIE 7125, Eighth International Symposium on Optical Storage and 2008 International Workshop on Information Data Storage, 712522 (19 March 2009); https://doi.org/10.1117/12.822594

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