Wire-grid polarizer for the UV spectral region

Thomas Weber; Hans-Jörg Fuchs; Holger Schmidt; Ernst-Bernhard Kley; Andreas Tünnermann

doi:10.1117/12.807993

18 February 2009 Wire-grid polarizer for the UV spectral region

Thomas Weber, Hans-Jörg Fuchs, Holger Schmidt, Ernst-Bernhard Kley, Andreas Tünnermann

Proceedings Volume 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II; 720504 (2009) https://doi.org/10.1117/12.807993
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

In this work we present a metal wire grid polarizer for the UV spectral region. The period of the aluminum grating is 100 nm. The grating was fabricated using a spatial frequency doubling technique. The process consist of electron-beamlithography, sputter coating and various ion-beam- and ICP etching steps. The features of the fabricated aluminum wires fulfill the theoretical demands with a height of 150 nm and a width of 35 nm. Optical parameters of the grating at 250 nm wavelength are 42% transmittance and an extinction ratio of almost 15. The optical parameters are even improved with the wavelength.

Citation Download Citation

Thomas Weber, Hans-Jörg Fuchs, Holger Schmidt, Ernst-Bernhard Kley, and Andreas Tünnermann "Wire-grid polarizer for the UV spectral region", Proc. SPIE 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II, 720504 (18 February 2009); https://doi.org/10.1117/12.807993

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