Pt/anodized TiO2/SiC-based MOS device for hydrocarbon sensing

M. Shafiei; A. Z. Sadek; Jerry C. W. Yu; R. Arsat; K. Kalantar-Zadeh; X. F. Yu; J. G. Partridge; W. Wlodarski

doi:10.1117/12.810108

30 December 2008 Pt/anodized TiO2/SiC-based MOS device for hydrocarbon sensing

M. Shafiei, A. Z. Sadek, Jerry C. W. Yu, R. Arsat, K. Kalantar-Zadeh, X. F. Yu, J. G. Partridge, W. Wlodarski

Proceedings Volume 7268, Smart Structures, Devices, and Systems IV; 72680K (2008) https://doi.org/10.1117/12.810108
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2008, Melbourne, Australia

Abstract

Pt/anodized TiO2/SiC based metal-oxide-semiconductor (MOS) devices were fabricated and characterized for their sensitivity towards propene (C3H6). Titanium (Ti) thin films were deposited onto the SiC substrates using a filtered cathodic vacuum arc (FCVA) method. Fluoride ions containing neutral electrolyte (0.5 wt% NH4F in ethylene glycol) were used to anodize the Ti films. The anodized films were subsequently annealed at 600 °C for 4 hrs in an oxygen rich environment to obtain TiO2. The current-voltage (I-V) characteristics of the Pt/TiO2/SiC devices were measured in different concentrations of propene. Exposure to the analyte gas caused a change in the Schottky barrier height and hence a lateral shift in the I-V characteristics. The effective change in the barrier height for 1% propene was calculated as 32.8 meV at 620°C. The dynamic response of the sensors was also investigated and a voltage shift of 157 mV was measured at 620°C during exposure to 1% propene.

Citation Download Citation

M. Shafiei, A. Z. Sadek, Jerry C. W. Yu, R. Arsat, K. Kalantar-Zadeh, X. F. Yu, J. G. Partridge, and W. Wlodarski "Pt/anodized TiO2/SiC-based MOS device for hydrocarbon sensing", Proc. SPIE 7268, Smart Structures, Devices, and Systems IV, 72680K (30 December 2008); https://doi.org/10.1117/12.810108

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available