Micro-machined infrared emitter with metallic photonic crystals structure

Fangqiang Li; Haisheng San; Meijing Cheng; Xuyuan Chen

doi:10.1117/12.832064

18 May 2009 Micro-machined infrared emitter with metallic photonic crystals structure

Fangqiang Li, Haisheng San, Meijing Cheng, Xuyuan Chen

Proceedings Volume 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 728406 (2009) https://doi.org/10.1117/12.832064
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

Infrared emitter (IR) with photonic crystal structure formed by a hexagonal array of holes has been designed. The processes for fabricating the emitter are developed basing on using silicon-on-insulator (SOI) wafer. The emission spectrum of the IR emitter is measured with spectroradiometer. The experimental results show that the infrared emitter exhibits a strong narrow-band emission in middle infrared range. The wavelengths of the measured emission peaks agree well with the theoretical prediction.

Citation Download Citation

Fangqiang Li, Haisheng San, Meijing Cheng, and Xuyuan Chen "Micro-machined infrared emitter with metallic photonic crystals structure", Proc. SPIE 7284, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 728406 (18 May 2009); https://doi.org/10.1117/12.832064

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