The case for electro-optic waveguide devices from ferroelectric (Pb,La)(Zr,Ti)O[sub]3[/sub] thin film epilayers

Ørnulf Nordseth; Jon Øyvind Kjellman; Change Chuan You; Arne Røyset; Thomas Tybell; Jostein K. Grepstad

doi:10.1117/12.835789

24 August 2009 The case for electro-optic waveguide devices from ferroelectric (Pb,La)(Zr,Ti)O₃ thin film epilayers

Ørnulf Nordseth, Jon Øyvind Kjellman, Change Chuan You, Arne Røyset, Thomas Tybell, Jostein K. Grepstad

Proceedings Volume 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors; 73810F (2009) https://doi.org/10.1117/12.835789
Event: International Symposium on Photoelectronic Detection and Imaging 2009, 2009, Beijing, China

Abstract

(Pb,La)(Zr,Ti)O₃ (PLZT) thin films were grown epitaxially on MgO(001) substrate by radio frequency magnetron sputtering. Different ridge-type waveguides, including a Mach-Zehnder interferometer with co-planar metal electrodes, were defined in the PLZT epilayer using standard photolithographic techniques. The propagation losses for transverse electric polarized infrared light (λ₀ = 1550 nm) in these ridge-type channel waveguides were measured at ~10 dB/cm. Electro-optic modulation was demonstrated with a half-wave voltage V_π ≈ 150 V for a 3 mm interaction length, corresponding to a Pockels coefficient r₅₁ ≈ 8.3 pm/V. Photonic crystal slabs (PCSs) were defined by etching a hexagonal two-dimensional lattice of holes in prepatterned ridge-type waveguides, using a focused ion beam. The sidewalls of the etched holes were inclined by an angle of ~10°. The impact on the transmission properties of these PCSs caused by out-of-plane structural asymmetries, such as deviation from a cylindrical shape of the FIB-etched air holes and the presence of a substrate with refractive index different from that of air, was investigated by numerical simulation. Auger depth profiling was used to investigate Ga⁺ ion implantation into the PLZT epilayer during FIB processing. The measurements suggest that such implantation of Ga⁺ is confined to the uppermost ~50 nm of the sample surface.

Citation Download Citation

Ørnulf Nordseth, Jon Øyvind Kjellman, Change Chuan You, Arne Røyset, Thomas Tybell, and Jostein K. Grepstad "The case for electro-optic waveguide devices from ferroelectric (Pb,La)(Zr,Ti)O₃ thin film epilayers", Proc. SPIE 7381, International Symposium on Photoelectronic Detection and Imaging 2009: Material and Device Technology for Sensors, 73810F (24 August 2009); https://doi.org/10.1117/12.835789

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available