Reference material (RM) 8820: a versatile new NIST standard for nanometrology

Michael T. Postek; Andras E. Vladar; William Keery; Michael Bishop; Benjamin Bunday; John Allgair

doi:10.1117/12.848037

1 April 2010 Reference material (RM) 8820: a versatile new NIST standard for nanometrology

Michael T. Postek, Andras E. Vladar, William Keery, Michael Bishop, Benjamin Bunday, John Allgair

Proceedings Volume 7638, Metrology, Inspection, and Process Control for Microlithography XXIV; 76381B (2010) https://doi.org/10.1117/12.848037
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

A new multipurpose instrument calibration standard has been released by NIST. This standard was developed to be used primarily for X and Y scale (or magnification) calibrations of scanning electron microscopes from less than 10 times magnification to more than 300 000 times magnifi cation, i.e., from about 10 mm to smaller than 300 nm range instrument field of view (FOV). This standard is identifi ed as RM 8820. This is a very versatile standard, and it can also be used for calibration and testing of other type of microscopes, such as optical and scanning probe microscopes. Beyond scale calibration, RM 8820 can be used for a number of other applications, some of which will be described in this publication.

Citation Download Citation

Michael T. Postek, Andras E. Vladar, William Keery, Michael Bishop, Benjamin Bunday, and John Allgair "Reference material (RM) 8820: a versatile new NIST standard for nanometrology", Proc. SPIE 7638, Metrology, Inspection, and Process Control for Microlithography XXIV, 76381B (1 April 2010); https://doi.org/10.1117/12.848037

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