Reconfigurable multivariable MEMS sensor array

Stephen van der Velden; Ian Powlesland; Jugdutt Singh

doi:10.1117/12.849013

31 March 2010 Reconfigurable multivariable MEMS sensor array

Stephen van der Velden, Ian Powlesland, Jugdutt Singh

Proceedings Volume 7647, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2010; 76471X (2010) https://doi.org/10.1117/12.849013
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2010, San Diego, California, United States

Abstract

Research into operational aspects of mini (<5kg) unmanned aerial vehicles (UAV) and structural health monitoring systems (SHM) is being conducted at the Defence Science and Technology Organisation and La Trobe University. A fundamental area of interest is investigating the problems associated with robustness of the control and health monitoring sensors for such systems. While many technologies for UAV and SHM systems can be, and have been, adapted from those currently available in large manned aircraft; cost, weight, and size constraints have prevented mini UAVs from including many of the robust mechanisms common to larger aircraft. Moreover, the ubiquitous nature of the sensing requirements for SHM systems has limited their uptake, due mainly to the same issues of cost, weight and size. This paper details the design of a reconfigurable multivariable MEMS (Micro Electro Mechanical System) array to address these issues. This array is composed of multiple instances of identical sensors, which can be dynamically reconfigured to achieve the desired measurand(s) with tradeoffs against accuracy. The available measurands include such items as; accelerations, rotational rates, magnetic fields (X, Y and Z directions), temperature and pressure. The paper presents the design of a reconfigurable multivariable MEMS sensor array together with simulation results.

Citation Download Citation

Stephen van der Velden, Ian Powlesland, and Jugdutt Singh "Reconfigurable multivariable MEMS sensor array", Proc. SPIE 7647, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2010, 76471X (31 March 2010); https://doi.org/10.1117/12.849013

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