Paper
1 September 2010 Radiation detectors based on 4H semi-insulating silicon carbide
Krishna C. Mandal, Ramesh Krishna, Peter G. Muzykov, Zegilor Laney, Sandip Das, Tangali S. Sudarshan
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Abstract
In this work, radiation detectors were fabricated using 8 mm × 8 mm substrates, ~ 390 μm in thickness, diced from commercial (0001) 4H-SiC semi-insulating wafer (> 109 Ohm-cm). Our characterization results, including x-ray diffraction (XRD), electron beam induced current (EBIC), chemical etching, cross-polarized imaging, thermally stimulated current (TSC) measurements, chemical etching and Raman spectroscopy, show the high quality of the semiinsulating SiC crystals, which are believed to meet the requirements of fabricating high performance radiation detectors. Current-voltage characteristics showed very low leakage current (~ 1.5 pA at -500 V) and the capability of detector's operation up to 200°C.
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Krishna C. Mandal, Ramesh Krishna, Peter G. Muzykov, Zegilor Laney, Sandip Das, and Tangali S. Sudarshan "Radiation detectors based on 4H semi-insulating silicon carbide", Proc. SPIE 7805, Hard X-Ray, Gamma-Ray, and Neutron Detector Physics XII, 78050U (1 September 2010); https://doi.org/10.1117/12.863572
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Cited by 5 scholarly publications.
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KEYWORDS
Silicon carbide

Sensors

Crystals

Etching

Raman spectroscopy

Sensor performance

Temperature metrology

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