17 January 2011Consideration of sensitivity with respect to diaphragm thickness and waveguide position in silicon-based guided-wave optical accelerometer
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Our group has developed a silicon-based guided-wave optical accelerometer with a proof mass centered on a diaphragm.
For this type of accelerometer, it is strongly suggested that sensitivity is related to waveguide position, diaphragm
dimensions, and size and weight of proof mass. In this study, sensitivity dependences on waveguide position and
diaphragm thickness were considered experimentally. Experimental results demonstrated that the highest sensitivity
could be obtained for the waveguide at the diaphragm edge and is inversely proportional to the square of the diaphragm
thickness.
Yusuke Miura,Hideto Endo,Takuya Oshima,Masashi Ohkawa, andTakashi Sato
"Consideration of sensitivity with respect to diaphragm thickness and waveguide position in silicon-based guided-wave optical accelerometer", Proc. SPIE 7941, Integrated Optics: Devices, Materials, and Technologies XV, 79410P (17 January 2011); https://doi.org/10.1117/12.873660
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Yusuke Miura, Hideto Endo, Takuya Oshima, Masashi Ohkawa, Takashi Sato, "Consideration of sensitivity with respect to diaphragm thickness and waveguide position in silicon-based guided-wave optical accelerometer," Proc. SPIE 7941, Integrated Optics: Devices, Materials, and Technologies XV, 79410P (17 January 2011); https://doi.org/10.1117/12.873660